DC Magnetron Sputtering System

This custom-built DC magnetron sputtering machine was designed to deposit thin, uniform metal films over small substrates (up to 1.5 × 1.5 cm²). While the system is simple in construction, it reliably produces high-quality thin films suitable for device fabrication and testing.

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The high-voltage DC power supply was ingeniously developed using a microwave oven transformer, coupled with a rectifier and voltage regulator, providing a stable and sufficient discharge for sputtering. The magnetron assembly includes a neodymium magnet, a water-cooling system, and a substrate holder, ensuring consistent plasma confinement and thermal management during deposition.

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This setup demonstrates a cost-effective approach to thin-film fabrication, making it a valuable tool in early-stage research and prototyping of photovoltaic and nanostructured devices.